Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11029611 | Device and method for detecting projection objective wave-front aberration | Feng Tang, Changzhe Peng, Xiangzhao Wang, Peng Li | 2021-06-08 |
| 11009336 | Method for wavefront measurement of optical imaging system based on grating shearing interferometry | Feng Tang, Xiangzhao Wang | 2021-05-18 |
| 10969274 | Method for detecting wavefront aberration for optical imaging system based on grating shearing interferometer | Feng Tang, Xiangzhao Wang | 2021-04-06 |