Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11066739 | Sputtering target, method for manufacturing sputtering target, and method for forming thin film | Shunpei Yamazaki, Tetsunori Maruyama, Yuki Imoto, Masahiro Watanabe, Mitsuo Mashiyama +3 more | 2021-07-20 |
| 10889888 | Sputtering target, method for manufacturing sputtering target, and method for forming thin film | Shunpei Yamazaki, Tetsunori Maruyama, Yuki Imoto, Masahiro Watanabe, Mitsuo Mashiyama +3 more | 2021-01-12 |