Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10910219 | Laser irradiation method and laser irradiation device and method of manufacturing semiconductor device | Koichiro Tanaka, Hidekazu Miyairi, Akihisa Shimomura, Atsuo Isobe | 2021-02-02 |