Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10930538 | Substrate alignment apparatus, substrate processing apparatus, and substrate processing method | Cheolmin Chol, Nam Ki HONG | 2021-02-23 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10930538 | Substrate alignment apparatus, substrate processing apparatus, and substrate processing method | Cheolmin Chol, Nam Ki HONG | 2021-02-23 |