Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10957517 | Substrate treating apparatus and temperature control method for gas distribution plate | Yunsik Ju, Byeong Hyeon KONG | 2021-03-23 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10957517 | Substrate treating apparatus and temperature control method for gas distribution plate | Yunsik Ju, Byeong Hyeon KONG | 2021-03-23 |