Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10961620 | Plasma etch-resistant film and a method for its fabrication | Pekka Soininen, Vasil Vorsa | 2021-03-30 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10961620 | Plasma etch-resistant film and a method for its fabrication | Pekka Soininen, Vasil Vorsa | 2021-03-30 |