Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11145516 | Substrate processing method and substrate processing apparatus | Yuya AKANISHI | 2021-10-12 |
| 11094564 | Processing liquid supplying apparatus, substrate processing apparatus and processing liquid supplying method | Shota IWAHATA, Eri Fujita, Yoshiyuki FUJITANI, Masako Mano, Yusuke TAKEMATSU +1 more | 2021-08-17 |
| 11018017 | Substrate treatment method | Akihisa IWASAKI | 2021-05-25 |