Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11192282 | Template, template manufacturing method, and semiconductor device manufacturing method | Anupam Mitra, Seiji Morita, Hirokazu Kato | 2021-12-07 |
| 10964539 | Imprinting method and semiconductor device manufacturing method | Hirokazu Kato, Takayuki Nakamura | 2021-03-30 |