Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10892171 | Removal apparatus for removing residual gas and substrate treating facility including the same | Heokjae Lee, Hahn Park, Jae Boo Kim, Dongil Yoon, MinYoung Hwang +4 more | 2021-01-12 |