Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11027394 | Load cup and chemical mechanical polishing apparatus and method of manufacturing including the same | Jieun Yang, Dong-il Yoon, Taemin Earmme, Gui Hyun Cho, Seok Heo +1 more | 2021-06-08 |
| 10996200 | Method of determining position of fault of equipment using sound source inputting apparatus and system of determining position of fault of equipment for performing the same | Kyoung-whan Oh, Won-Yup Ko, Won Ki Park, Ho-Youl Lee, Young Il Jang +1 more | 2021-05-04 |