Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11189533 | Wafer quality inspection method and apparatus, and semiconductor device manufacturing method including the wafer quality inspection method | Jong-Hyun Choi, Seok-Bae Moon, Jae Hyuk Choi, Won Ki Park | 2021-11-30 |
| 11027394 | Load cup and chemical mechanical polishing apparatus and method of manufacturing including the same | Jieun Yang, Dong-il Yoon, Taemin Earmme, Gui Hyun Cho, Seok Heo +1 more | 2021-06-08 |