Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11127570 | Plasma source and plasma generation apparatus using the same | Geun-Young Yeom, Ki Hyun Kim, Ki Seok Kim, You Jin JI, Jin-Woo Park +5 more | 2021-09-21 |
| 11120975 | Ion beam etching apparatus | Geun-Young Yeom, Jin-Woo Park, Doo San KIM, Jong Sik Oh, Da In SUNG +6 more | 2021-09-14 |
| 10896920 | Thin film transistor array substrate and manufacturing method thereof | Young-Wook Lee, Woo-Geun Lee, Ki-Won Kim, Hyun-Jung Lee | 2021-01-19 |