Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11120998 | Etching method and methods of manufacturing semiconductor device using the same | Sang Hyun Lee, Sung Woo Kang, Hong-sik Shin, Young Mook Oh, Seung Min Lee | 2021-09-14 |