Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11018045 | Deposition apparatus including upper shower head and lower shower head | Ji Youn Seo, Byung-Sun Park, Sung-Jin Park, Ji Woon Im, Hyun-Seok Lim +5 more | 2021-05-25 |
| 10971521 | Three-dimensional semiconductor device | Han Yang, Yong-Hoon Son, Moon Jong Kang, Sung-Soo Ahn, So Yoon Lee | 2021-04-06 |