Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10910202 | Plasma sensing device, plasma monitoring system and method of controlling plasma processes | Sang Woo BAE, Seul Gi LEE, Won-Don Joo | 2021-02-02 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10910202 | Plasma sensing device, plasma monitoring system and method of controlling plasma processes | Sang Woo BAE, Seul Gi LEE, Won-Don Joo | 2021-02-02 |