Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11009790 | Photoacid generator and photoresist composition including the same | Suk Koo HONG, Kyoung-Yong Cho, Hyo-Sung Lee, Mi-yeong Kang, Gun Woo Park | 2021-05-18 |
| 10983434 | Photoresist composition for deep ultraviolet light patterning method and method of manufacturing semiconductor device | Jeong-ho Mun, Suk Koo HONG, Jin Joo Kim | 2021-04-20 |