Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10969691 | Extreme ultraviolet exposure apparatus and method, and method of manufacturing semiconductor device by using the exposure method | Seung Yoon Lee, Doo-gyu Lee | 2021-04-06 |
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Chan-sam Chang
Overall (2021): #504,266 of 548,734Top 95%
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Patents 2021