Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11114298 | Light generator including debris shielding assembly, photolithographic apparatus including the light generator, and method of manufacturing integrated circuit device using the photolithographic apparatus | — | 2021-09-07 |
| 10890527 | EUV mask inspection apparatus and method, and EUV mask manufacturing method including EUV mask inspection method | — | 2021-01-12 |