Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11149347 | Process for etching, and chamber cleaning and a gas therefor | Michael Pittroff, Jamila Boudaden | 2021-10-19 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11149347 | Process for etching, and chamber cleaning and a gas therefor | Michael Pittroff, Jamila Boudaden | 2021-10-19 |