Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11084714 | Method for setting a pressure in a cavity formed with the aid of a substrate and a substrate cap, and system | Achim Kronenberger, Rafel Ferre I Tomas | 2021-08-10 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11084714 | Method for setting a pressure in a cavity formed with the aid of a substrate and a substrate cap, and system | Achim Kronenberger, Rafel Ferre I Tomas | 2021-08-10 |