Issued Patents 2021
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11111137 | Method for manufacturing a micromechanical sensor | — | 2021-09-07 |
| 11073534 | Component including an optimized multilayer torsion spring | — | 2021-07-27 |
| 11014807 | Method for producing a system including a first microelectromechanical element and a second microelectromechanical element, and a system | — | 2021-05-25 |
| 10914937 | Pivot apparatus for a micromirror, and illumination apparatus having a pivot apparatus for a micromirror | Ralf Noltemeyer, Arnd Kaelberer, Peter Sudy, Hans Artmann | 2021-02-09 |
| 10900996 | Micromechanical sensor and method for manufacturing a micromechanical sensor | Antoine Puygranier, Denis Gugel, Guenther-Nino-Carlo Ullrich, Markus Linck-Lescanne | 2021-01-26 |