Issued Patents 2021
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11149231 | Cleaning liquid, cleaning method, and method for producing semiconductor wafer | Yutaro Takeshita, Toshiaki Shibata, Kan TAKESHITA | 2021-10-19 |
| 11066627 | Cleaning agent composition for semiconductor device substrate, method of cleaning semiconductor device substrate, method of manufacturing semiconductor device substrate, and semiconductor device substrate | Tomohiro Kusano, Yasuhiro Kawase | 2021-07-20 |
| 11024482 | Holography reconstruction method and program | Kodai Niitsu, Keiko Shimada | 2021-06-01 |
| 11011344 | Interferometric electron microscope | Toshiaki Tanigaki, Tetsuya Akashi | 2021-05-18 |
| 10948426 | Particle beam device, observation method, and diffraction grating | Keiko Shimada, Kodai Niitsu | 2021-03-16 |