Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11078123 | Metal oxynitride thin film, process for producing metal oxynitride thin film, and capacitor element | Kumiko Yamazaki, Yuki Nagamine, Takeshi Shibahara, Yuji Umeda | 2021-08-03 |