CZ

Chengshuang Zhang

SC Shanghai Micro Electronics Equipment (Group) Co.: 1 patents #20 of 59Top 35%
📍 Singapore, SG: #396 of 1,679 inventorsTop 25%
Overall (2021): #492,539 of 548,734Top 90%
1
Patents 2021

Issued Patents 2021

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
10901331 Coaxial mask alignment device, photolithography apparatus and alignment method — 2021-01-26