Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10892334 | n-Type SiC single crystal substrate, method for producing same and SiC epitaxial wafer | Kazuma ETO, Tomohisa Kato | 2021-01-12 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10892334 | n-Type SiC single crystal substrate, method for producing same and SiC epitaxial wafer | Kazuma ETO, Tomohisa Kato | 2021-01-12 |