Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11181830 | Lithographic apparatus and method of controlling a lithographic apparatus | Philip Groeger, Wansoo Kim | 2021-11-23 |
| 11092901 | Wafer exposure method using wafer models and wafer fabrication assembly | Philip Groeger, Patrick Lomtscher | 2021-08-17 |