Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11069521 | Subnanometer-level light-based substrate cleaning mechanism | Harry Christov | 2021-07-20 |
| 10985039 | Sub-nanometer-level substrate cleaning mechanism | Harry Christov | 2021-04-20 |
| 10892172 | Removal of process effluents | Harry Christov | 2021-01-12 |