Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11149341 | Mask plate and manufacture method thereof, mask assembly and vapor deposition apparatus | Xinjian Zhang, Liguo Liu | 2021-10-19 |
| 10928130 | Drying system and drying method for cleaning solution on mask | Zhiming Lin, Zhen Wang, Baojun Li, Chun-Chieh Huang | 2021-02-23 |