Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11011355 | Temperature-tuned substrate support for substrate processing systems | Himanshu Chokshi | 2021-05-18 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11011355 | Temperature-tuned substrate support for substrate processing systems | Himanshu Chokshi | 2021-05-18 |