Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11064299 | MEMS structure, capacitive sensor, piezoelectric sensor, acoustic sensor having mems structure | Ayumu Murakami, Tadashi Inoue | 2021-07-13 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11064299 | MEMS structure, capacitive sensor, piezoelectric sensor, acoustic sensor having mems structure | Ayumu Murakami, Tadashi Inoue | 2021-07-13 |