Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10916417 | Pre-processing method, method for forming metal silicide and semiconductor processing apparatus | Xiaodong Liu, Jian-Zhi Fang, Chen-Hao Liu | 2021-02-09 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10916417 | Pre-processing method, method for forming metal silicide and semiconductor processing apparatus | Xiaodong Liu, Jian-Zhi Fang, Chen-Hao Liu | 2021-02-09 |