Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11211227 | Multi charged particle beam evaluation method and multi charged particle beam writing device | — | 2021-12-28 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11211227 | Multi charged particle beam evaluation method and multi charged particle beam writing device | — | 2021-12-28 |