Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10896801 | Multiple electron beam image acquisition apparatus, and alignment method of multiple electron beam optical system | Kazuhiko Inoue, Yoshihiro Izumi | 2021-01-19 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10896801 | Multiple electron beam image acquisition apparatus, and alignment method of multiple electron beam optical system | Kazuhiko Inoue, Yoshihiro Izumi | 2021-01-19 |