Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10950473 | Heat source device and substrate processing apparatus including same | Ji-Young Jeong | 2021-03-16 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10950473 | Heat source device and substrate processing apparatus including same | Ji-Young Jeong | 2021-03-16 |