Yasushi OBARA

SC Speedfam Co.: 1 patents #1 of 1Top 100%

📍 Kitakami, JP: #1 of 2 inventorsTop 50%

Overall (2021): #204,933 of 548,734Top 40%

Patents 2021

Issued Patents 2021

Showing 1–1 of 1 patents

Patent #	Title	Co-Inventors	Date
11145492	Local dry etching apparatus	—	2021-10-12