TK

Tohru Kiuchi

NI Nikon: 1 patents #74 of 257Top 30%
Overall (2021): #228,840 of 548,734Top 45%
1
Patents 2021

Issued Patents 2021

Patent #TitleCo-InventorsDate
11073767 Substrate processing apparatus, processing apparatus, and method for manufacturing device Masaki Kato 2021-07-27