Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11187987 | Exposure apparatus and exposure method, and flat panel display manufacturing method | Takashi Shibuya | 2021-11-30 |
| 11169448 | Movable body apparatus, exposure apparatus, manufacturing method of flat panel display, device manufacturing method, and movable body drive method | — | 2021-11-09 |
| 11086236 | Exposure apparatus and exposure method, and flat panel display manufacturing method | Takashi Shibuya | 2021-08-10 |