Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11056315 | Ionization chamber chip for a nano-aperture ion source, method of fabrication thereof, and a proton beam writing system | Jeroen Anton VAN KAN, Xinxin XU, Santhana Ramam Pattabiraman | 2021-07-06 |