Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11187518 | Method and apparatus for super-resolution optical metrology | Nikolay Ivanovich Zheludev | 2021-11-30 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11187518 | Method and apparatus for super-resolution optical metrology | Nikolay Ivanovich Zheludev | 2021-11-30 |