Issued Patents 2021
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11189509 | System and method for controlling semiconductor manufacturing equipment | Feng-Ju Tsai | 2021-11-30 |
| 11037805 | Wafer cleaning apparatus and method of cleaning wafer | Feng-Ju Tsai | 2021-06-15 |
| 10998218 | Wet cleaning apparatus and manufacturing method using the same | Feng-Ju Tsai | 2021-05-04 |
| 10916452 | Wafer drying equipment and method thereof | Feng-Ju Tsai | 2021-02-09 |