Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11150195 | Sample surface polarization modification in interferometric defect inspection | — | 2021-10-19 |
| 10935501 | Sub-resolution defect detection | — | 2021-03-02 |
| 10937705 | Sample inspection using topography | Holly M. Edmundson, Michael Gilmore | 2021-03-02 |