Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11187561 | Methods and apparatus for pressure based mass flow ratio control | — | 2021-11-30 |
| 10969799 | System for and method of fast pulse gas delivery | Michael L'Bassi, Tseng-Chung Lee | 2021-04-06 |