Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11193094 | Liquid composition for reducing damage of cobalt, alumina, interlayer insulating film and silicon nitride, and washing method using same | Toshiyuki Oie, Akinobu HORITA | 2021-12-07 |
| 11174399 | Surface treatment method for imparting alcohol repellency to semiconductor substrate | Kenji Shimada | 2021-11-16 |