Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10882141 | Substrate suction stage, substrate treatment apparatus, and substrate treatment method | — | 2021-01-05 |
TM
Tamio Matsumura
Overall (2021): #241,361 of 548,734Top 45%
1
Patents 2021