Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11031306 | Quality control method of position measurement light source, semiconductor manufacturing apparatus, and method for manufacturing semiconductor device | Miki Toshima | 2021-06-08 |
| 10971511 | Semiconductor memory | Tomoo Hishida, Ryota Katsumata, Masao Iwase | 2021-04-06 |