Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11062925 | Semiconductor manufacturing apparatus and method of manufacturing semiconductor device | Kazuo Yoshida | 2021-07-13 |
| 10930559 | Method for manufacturing semiconductor device | Tatsuro Yoshino, Masato Suzuki, Kenji Yoshikawa | 2021-02-23 |