Issued Patents 2021
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11211239 | Extreme ultraviolet light generation apparatus and extreme ultraviolet light generation apparatus controlling method | Takashi Saito | 2021-12-28 |
| 11145429 | Extreme ultraviolet chamber apparatus, extreme ultraviolet light generation system, and method for manufacturing electronic device | Gota Niimi, Georg Soumagne | 2021-10-12 |
| 11139519 | Sealed cell and method for manufacturing same | Yusuke Tominaga, Kazumichi Shimizu, Shota Ikeda, Kyosuke Miyata, Sadahiro Hattori +4 more | 2021-10-05 |
| 11036143 | Extreme ultraviolet light generation apparatus and electronic device manufacturing method | — | 2021-06-15 |
| 10990016 | Extreme ultraviolet light generation device | — | 2021-04-27 |