Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11094572 | Substrate processing apparatus and recording medium | Osamu Morita, Yuji Yamaoka, Toshiro Koshimaki, Hiroyuki KITAMOTO | 2021-08-17 |
| 11038024 | Self-standing GaN substrate, GaN crystal, method for producing GaN single crystal, and method for producing semiconductor device | Satoru Nagao, Yusuke Tsukada, Kazunori Kamada, Hirotaka Ikeda, Kenji Fujito +3 more | 2021-06-15 |
| 11031475 | Self-standing GaN substrate, GaN crystal, method for producing GaN single crystal, and method for producing semiconductor device | Satoru Nagao, Yusuke Tsukada, Kazunori Kamada, Hirotaka Ikeda, Kenji Fujito +3 more | 2021-06-08 |