Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11152205 | Silicon chalcogenate precursors comprising a chemical formula of si(XR1)nR24-n and methods of forming the silicon chalcogenate precursors | Sumeet C. Pandey, Stefan Uhlenbrock | 2021-10-19 |
| 10964532 | Methods of forming semiconductor devices comprising silicon nitride on high aspect ratio features | Sumeet C. Pandey, Brenda D. Kraus, Stefan Uhlenbrock, John Smythe | 2021-03-30 |
| 10930548 | Methods of forming an apparatus for making semiconductor dieves | Shane J. Trapp, Byeung Chul Kim | 2021-02-23 |