Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11211228 | Neutral radical etching of dielectric sacrificial material from reentrant multi-layer metal structures | Adam L. Cohen | 2021-12-28 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11211228 | Neutral radical etching of dielectric sacrificial material from reentrant multi-layer metal structures | Adam L. Cohen | 2021-12-28 |